HDDInsight 

For the first time, a tool for HDD manufacturers, HDDInsight, quantifies RLT process variation using Mercator view images from KT's Candela tools.

Motivation #1:  Residual Layer Thickness (RLT) variation is visible on Candela Specular Reflection images; however, the variation is not quantified. No software tool is provided to perform process variation analysis either, so there is no way to quickly extract quantitative information from the images.

Motivation #2: Candela images identify areas that need additional metrology, but verification is slow and difficult. Residual Layer Thickness, CD and Pitch data extraction require AFM/SEM analysis. AFM's and SEM's are slow, only generate a few data points, and require a lot of work to get very limited information

   Applications:

   Inputs:

   Outputs:

  • Characterize template signatures
  • Monitor processes
  • Monitor tools - Weekly quals, ID Missing nozzle/s, ODARC changes
  • Verify tool quals - New template, chuck, or drop pattern
  • Quantify development test results
  • Candela specular reflection channel images, Mercator view
  • Bright / Dark spot counts
  • Bright / Dark spot average size
  • Bright / Dark spot standard deviation
  • Offset between bright and dark spot populations
  • Thickness variation (with calibration and verification using AFM)