For the first time, a tool for HDD manufacturers, HDDInsight, quantifies RLT process variation using Mercator view images from KT's Candela tools.
Motivation #1: Residual Layer Thickness (RLT) variation is visible on Candela Specular Reflection images; however, the variation is not quantified. No software tool is provided to perform process variation analysis either, so there is no way to quickly extract quantitative information from the images.
Motivation #2: Candela images identify areas that need additional metrology, but verification is slow and difficult. Residual Layer Thickness, CD and Pitch data extraction require AFM/SEM analysis. AFM's and SEM's are slow, only generate a few data points, and require a lot of work to get very limited information
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